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Article Dans Une Revue Sensors and Actuators A: Physical Année : 2000

Giant magnetostriction thin films for multi-cantilever micro-structures driving

Jamal Ben Youssef

Résumé

First results on the realisation of a micrometer GaInAs multi-cantilever structure (50×30×1 μm3 each) driven by amorphous TbFe magnetostrictive thin films are presented. Magneto-elastic properties of the cantilevers were studied by dynamic excitation methods. A resonance of the bimorph cantilevers was observed at an excitation frequency of 0.8 MHz with a Q-factor of about 103. The coercive force of the magnetic films sputtered on micro-cantilevers was found to be Hc=8 Oe.

Dates et versions

hal-00158454 , version 1 (29-06-2007)

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Nicolas Tiercelin, Philippe Pernod, Vladimir Preobrazhensky, Henri Le Gall, Jamal Ben Youssef, et al.. Giant magnetostriction thin films for multi-cantilever micro-structures driving. Sensors and Actuators A: Physical , 2000, 81 (1-3), pp.162-165. ⟨10.1016/S0924-4247(99)00144-2⟩. ⟨hal-00158454⟩
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