Giant magnetostriction thin films for multi-cantilever micro-structures driving
Résumé
First results on the realisation of a micrometer GaInAs multi-cantilever structure (50×30×1 μm3 each) driven by amorphous TbFe magnetostrictive thin films are presented. Magneto-elastic properties of the cantilevers were studied by dynamic excitation methods. A resonance of the bimorph cantilevers was observed at an excitation frequency of 0.8 MHz with a Q-factor of about 103. The coercive force of the magnetic films sputtered on micro-cantilevers was found to be Hc=8 Oe.