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Article Dans Une Revue Applied optics Année : 2005

Photonic devices based on preferential etching

Résumé

We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid crystals in the waveguides and demonstrated guided propagation. Therefore this technology is a suitable platform for soft-matter photonics and heterogeneous integration.
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Dates et versions

hal-00154910 , version 1 (15-06-2007)

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Bob Bellini, Jean-François Larchanché, Jean-Pierre Vilcot, Didier Decoster, Romeo Beccherelli, et al.. Photonic devices based on preferential etching. Applied optics, 2005, 44, pp.7181-7186. ⟨10.1364/AO.44.007181⟩. ⟨hal-00154910⟩
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