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Conference Papers Year : 2001

ECR-silicon nitride passivation of III-V transistors

S. Shapoval
  • Function : Author
V. Gurtovoi
  • Function : Author
A. Kovalchuk
  • Function : Author
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Dates and versions

hal-00152674 , version 1 (07-06-2007)

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  • HAL Id : hal-00152674 , version 1

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S. Shapoval, V. Gurtovoi, A. Kovalchuk, Christophe Gaquière. ECR-silicon nitride passivation of III-V transistors. XXV Workshop on Compound Semiconductor Devices and Integrated Circuits held in Europe, WOCSDICE 2001, 2001, Cagliari, Sardinia, Italy. ⟨hal-00152674⟩
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