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Article Dans Une Revue Belgian Journal of Electronics & Communications HF Année : 2001

3D self-assembling microstructures for optical MEMS devices : concept and applications

Résumé

An advanced 3-D self-assembling technique of surface micromachined polysilicon structures is presented here aiming at the realization of dedicated large stroke actuators for optical applications. 3-D Polysilicon microparts are self-assembled by beam buckling induced by integrated Scratch Drive Actuator (SDA). With this technique, 380 × 250 μm2 micro-plates were lifted upward at 90 μm above substrate plane. Once the assembling has been performed, the 3-D shapes are permanently kept by an integrated mechanical lock. Subsequent to the 3-D assembling, microplates were successfully actuated by biasing underneath buried electrodes. Controlled motion up to +/- 15° rotation was measured and analyzed by means of both analytical and numerical models. Long term actuations were carried out without any observable changes even for 0.5 μm thin polysilicon structures. Therefore, 3-D large stroke actuator has been implemented in a Micro Opto Electro Mechanical System (MOEMS): A continuous me mbrane for adaptive optics application. This original device demonstrates, for the first time, both positive and negative deflection with individual pixel displacement of +/- 10 μm, which is one order of magnitude larger than usual approaches. The deformable mirror is constituted by a thin film bulk-micromachined membrane that covers large stroke actuators composed of an array of self-assembling / self-locking 3-D polysilicon electrostatic microplates
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Dates et versions

hal-00152462 , version 1 (07-06-2007)

Identifiants

  • HAL Id : hal-00152462 , version 1

Citer

Emmanuel Quévy, Vincent Agache, Olivier Millet, Matthieu Lagouge, Patrice Bigotte, et al.. 3D self-assembling microstructures for optical MEMS devices : concept and applications. Belgian Journal of Electronics & Communications HF, 2001, 2, pp.9-25. ⟨hal-00152462⟩
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