Journal Articles
Microelectronics Reliability
Year : 2002
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https://hal.science/hal-00148766
Submitted on : Wednesday, May 23, 2007-10:44:37 AM
Last modification on : Friday, November 22, 2024-4:46:27 PM
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- HAL Id : hal-00148766 , version 1
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O. Millet, D. Collard, L. Buchaillot. Reliability of polysilicon microstructures : in situ test benches. Microelectronics Reliability, 2002, 42, pp.1795-1800. ⟨hal-00148766⟩
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