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Journal Articles Microelectronics Reliability Year : 2002

Reliability of polysilicon microstructures : in situ test benches

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hal-00148766 , version 1 (23-05-2007)

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  • HAL Id : hal-00148766 , version 1

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O. Millet, D. Collard, L. Buchaillot. Reliability of polysilicon microstructures : in situ test benches. Microelectronics Reliability, 2002, 42, pp.1795-1800. ⟨hal-00148766⟩
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