Journal Articles
Journal of Micromechanics and Microengineering
Year : 2002
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https://hal.science/hal-00148763
Submitted on : Wednesday, May 23, 2007-10:44:37 AM
Last modification on : Friday, March 24, 2023-2:52:48 PM
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- HAL Id : hal-00148763 , version 1
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E. Quevy, B. Parvais, J.P. Raskin, L. Buchaillot, D. Flandre, et al.. A modified bosch-type process for precise surface micromachining of polysilicon. Journal of Micromechanics and Microengineering, 2002, 12, pp.328-333. ⟨hal-00148763⟩
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