A modified bosch-type process for precise surface micromachining of polysilicon - Archive ouverte HAL Access content directly
Journal Articles Journal of Micromechanics and Microengineering Year : 2002

A modified bosch-type process for precise surface micromachining of polysilicon

B. Parvais
  • Function : Author
J.P. Raskin
  • Function : Author
L. Buchaillot
D. Flandre
  • Function : Author
D. Collard
  • Function : Author
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Dates and versions

hal-00148763 , version 1 (23-05-2007)

Identifiers

  • HAL Id : hal-00148763 , version 1

Cite

E. Quevy, B. Parvais, J.P. Raskin, L. Buchaillot, D. Flandre, et al.. A modified bosch-type process for precise surface micromachining of polysilicon. Journal of Micromechanics and Microengineering, 2002, 12, pp.328-333. ⟨hal-00148763⟩
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