New all 2-inch manufacturable high performance evanescent coupled waveguide photodiodes with etched mirrors for 40Gb/s optical receivers
Résumé
Evanescent PIN photodiodes are fabricated using all 2”-InP processing including on-wafer mirrors and coatings. 0.73 A/W responsivity at 1.55 µm, -1 dB vertical coupling tolerance of 2.2 µm and 47 GHz bandwidth are simultaneously demonstrated.