Conference Papers
Year : 2003
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https://hal.science/hal-00146455
Submitted on : Tuesday, May 15, 2007-9:16:16 AM
Last modification on : Friday, March 24, 2023-2:52:48 PM
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- HAL Id : hal-00146455 , version 1
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O. Millet, D. Collard, L. Buchaillot. Fiabilité des microstructures en polysilicium : création de bancs de test in situ. 16ème Congrès Francais de Mécanique, 2003, Nice, France. ⟨hal-00146455⟩
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