Conference Papers
Year : 2003
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https://hal.science/hal-00146424
Submitted on : Tuesday, May 15, 2007-8:47:21 AM
Last modification on : Friday, March 24, 2023-2:52:48 PM
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- HAL Id : hal-00146424 , version 1
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A. Laszcz, J. Katcki, J. Ratajczak, G. Larrieu, Emmanuel Dubois, et al.. Transmission electron microscopy of iridium silicide contacts for advanced MOSFET structures with Schottky source and drain. European Materials Research Society Fall Meeting, 2003, Warsaw, Poland. ⟨hal-00146424⟩
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