Techniques for mechanical strain analysis in submicron structures : TEM/CBED, micro-Raman spectroscopy, X-RAY micro-diffraction and modelling - Archive ouverte HAL Access content directly
Journal Articles Microelectronic Engineering Year : 2003

Techniques for mechanical strain analysis in submicron structures : TEM/CBED, micro-Raman spectroscopy, X-RAY micro-diffraction and modelling

I. de Wolf
  • Function : Author
R. Balboni
  • Function : Author
A. Armigliato
  • Function : Author
S. Frabboni
  • Function : Author
A. Cedola
  • Function : Author
S. Lagomarsino
  • Function : Author
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Dates and versions

hal-00146410 , version 1 (15-05-2007)

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  • HAL Id : hal-00146410 , version 1

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I. de Wolf, V. Senez, R. Balboni, A. Armigliato, S. Frabboni, et al.. Techniques for mechanical strain analysis in submicron structures : TEM/CBED, micro-Raman spectroscopy, X-RAY micro-diffraction and modelling. Microelectronic Engineering, 2003, 70, pp.425-435. ⟨hal-00146410⟩
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