Journal Articles
Microelectronic Engineering
Year : 2003
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https://hal.science/hal-00146410
Submitted on : Tuesday, May 15, 2007-8:30:37 AM
Last modification on : Friday, March 24, 2023-2:52:48 PM
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- HAL Id : hal-00146410 , version 1
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I. de Wolf, V. Senez, R. Balboni, A. Armigliato, S. Frabboni, et al.. Techniques for mechanical strain analysis in submicron structures : TEM/CBED, micro-Raman spectroscopy, X-RAY micro-diffraction and modelling. Microelectronic Engineering, 2003, 70, pp.425-435. ⟨hal-00146410⟩
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