Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction - Archive ouverte HAL
Journal Articles Journal of Micromechanics and Microengineering Year : 2003

Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction

D. Galayko
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
CV
A. Kaiser
CV
L. Buchaillot
Bernard Legrand
CV
D. Collard
  • Function : Author
C. Combi
  • Function : Author

Collection IEMN  : Connect in order to contact the contributor

https://hal.science/hal-00146391

Submitted on : Tuesday, May 15, 2007-8:18:13 AM

Last modification on : Wednesday, January 24, 2024-9:54:18 AM

No file

Dates and versions

hal-00146391 , version 1 (15-05-2007)

Identifiers

  • HAL Id : hal-00146391 , version 1

Cite

D. Galayko, A. Kaiser, L. Buchaillot, Bernard Legrand, D. Collard, et al.. Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction. Journal of Micromechanics and Microengineering, 2003, 13, pp.134-140. ⟨hal-00146391⟩

Export

BibTeX XML-TEI Dublin Core DC Terms EndNote DataCite

Collections

CNRS UNIV-VALENCIENNES IEMN UNIV-LILLE
27 View
0 Download

Share

More