Low-loss InGaAsP/InP submicron optical waveguides fabricated by ICP etching
Résumé
The fabrication and characterisation of low-loss InGaAsP/InP optical submicron waveguides made with ICP etching is reported. Their width ranges from 0.2 to 2 μm. For the 0.5 μm width, the propagation losses at λ=1.55 μm as low as 4.2 dB/mm have been measured.