Journal Articles
Microelectronic Engineering
Year : 2004
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https://hal.science/hal-00141186
Submitted on : Thursday, April 12, 2007-9:23:57 AM
Last modification on : Friday, March 24, 2023-2:52:48 PM
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- HAL Id : hal-00141186 , version 1
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D. Lauvernier, Jean-Pierre Vilcot, M. Francois, Didier Decoster. Optimization of HSQ resist e-beam processing technique on GaAs material. Microelectronic Engineering, 2004, 75, pp.177-182. ⟨hal-00141186⟩
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