Optimization of HSQ resist e-beam processing technique on GaAs material - Archive ouverte HAL Access content directly
Journal Articles Microelectronic Engineering Year : 2004

Optimization of HSQ resist e-beam processing technique on GaAs material

Jean-Pierre Vilcot
M. Francois
  • Function : Author
Didier Decoster
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Dates and versions

hal-00141186 , version 1 (12-04-2007)

Identifiers

  • HAL Id : hal-00141186 , version 1

Cite

D. Lauvernier, Jean-Pierre Vilcot, M. Francois, Didier Decoster. Optimization of HSQ resist e-beam processing technique on GaAs material. Microelectronic Engineering, 2004, 75, pp.177-182. ⟨hal-00141186⟩
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