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              <p>We have demonstrated a low-cost high-bandwidth and high-responsivity evanescent waveguide unitravelling-carrier photodiode (PD) fabricated using all 2-in InP processing including on-wafer mirrors and coating. Optimization of the optical input waveguide was made using the method of the genetic algorithm associated with a beam propagation method. Optical fiber coupling to the PD is based on a diluted multimode waveguide allowing simple material epitaxial growth. The fabricated PDs exhibit simultaneously 0.76-A/W responsivity at 1.55 /spl mu/m, &gt;50-GHz bandwidth, and more than 22-mA average saturation photocurrent at 50 GHz. The light polarization dependence is less than 0.1 dB</p>
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