Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrate - Archive ouverte HAL Access content directly
Conference Papers Year : 2005

Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrate

A. Łaszcz
  • Function : Author
J. Katcki
  • Function : Author
J. Ratajczak
  • Function : Author
Xing Tang
  • Function : Author
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hal-00139246 , version 1 (30-03-2007)

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  • HAL Id : hal-00139246 , version 1

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A. Łaszcz, J. Katcki, J. Ratajczak, Xing Tang, Emmanuel Dubois. Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrate. Proceedings of the XII International Conference on Electron Microscopy of Solids, EM'2005, 2005, Kazimierz Dolny, Poland. ⟨hal-00139246⟩
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