Wafer bonding process for III-V nanowires in BCB high index contrast waveguides - Archive ouverte HAL
Conference Papers Year : 2006

Wafer bonding process for III-V nanowires in BCB high index contrast waveguides

Michel Carette
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
D. Lauvernier
  • Function : Author
Jean-Pierre Vilcot
D. Bernard
  • Function : Author
Didier Decoster

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https://hal.science/hal-00138907

Submitted on : Wednesday, March 28, 2007-10:27:30 AM

Last modification on : Wednesday, January 24, 2024-9:54:18 AM

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hal-00138907 , version 1 (28-03-2007)

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  • HAL Id : hal-00138907 , version 1

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Michel Carette, D. Lauvernier, Jean-Pierre Vilcot, D. Bernard, Didier Decoster. Wafer bonding process for III-V nanowires in BCB high index contrast waveguides. WAPITI/PICMOS Workshop on III/V photonic components 3 dimensional integration, 2006, Halle, Germany. ⟨hal-00138907⟩

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