Fabrication and characterization of high index contrast optical nanowires in III-V semiconductor/benzocyclobutene - Archive ouverte HAL
Conference Papers Year : 2006

Fabrication and characterization of high index contrast optical nanowires in III-V semiconductor/benzocyclobutene

Michel Carette
D. Lauvernier
  • Function : Author
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
Malek Zegaoui
Jean Chazelas
  • Function : Author
Jean-Pierre Vilcot
D. Bernard
  • Function : Author
Didier Decoster

Abstract

We expose the technological process to realize III-V semiconductor optical nanowires embedded in a Benzocyclobutene (BCB) matrix based on adhesive wafer bonding. We also point out some properties of those nanophotonic waveguides to develop all optical switches.

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Engineering Sciences [physics]

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https://hal.science/hal-00138751

Submitted on : Tuesday, March 27, 2007-11:40:35 AM

Last modification on : Wednesday, January 24, 2024-9:54:18 AM

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hal-00138751 , version 1 (27-03-2007)

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Michel Carette, D. Lauvernier, Malek Zegaoui, Jean Chazelas, Jean-Pierre Vilcot, et al.. Fabrication and characterization of high index contrast optical nanowires in III-V semiconductor/benzocyclobutene. European Conference on Optical Communication (ECOC), Jul 2006, Cannes, France. pp.217-218, ⟨10.1109/ECOC.2006.4801241⟩. ⟨hal-00138751⟩

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