A Bi-stable Micro-machined Piezoelectric Transducer for Mechanical to Electrical Energy Transformation
Résumé
The development of micro-machined ultrasonic transducers on silicon opens new appli-cation fields for Si-based acoustic sensors operating in air or in liquids. In this work, wedescribe the fabrication of piezoelectric micro-machined ultrasonic transducers (pMUT)first dedicated to ultrasonic imaging applications that may be used as a mechanical toelectrical energy transformer for energy scavenging purpose [1]. We report on the fab-rication of PZT/Si piezoelectric micro-machined ultrasonic transducers (pMUTs) firstdesigned for acoustic applications and on tests of these devices as scavenging energyexperiment.
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