<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-00135402</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-03T06:35:35+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Electrical characterisation of SrTiO3 thin films deposited on Si(100) substrate by liquid injection MOCVD</title>
            <author role="aut">
              <persName>
                <forename type="first">J.</forename>
                <surname>Legrand</surname>
              </persName>
              <email type="md5">c32333e8efd16ed4ea4b70f697ee40d3</email>
              <email type="domain">univ-nantes.fr</email>
              <idno type="idhal" notation="string">jack-legrand</idno>
              <idno type="idhal" notation="numeric">735589</idno>
              <idno type="halauthorid" notation="string">128671-735589</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-9028-7575</idno>
              <idno type="IDREF">https://www.idref.fr/060386576</idno>
              <affiliation ref="#struct-696"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">S.</forename>
                <surname>Lhostis</surname>
              </persName>
              <idno type="halauthorid">115570-0</idno>
              <affiliation ref="#struct-761"/>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Y.</forename>
                <surname>Chang</surname>
              </persName>
              <idno type="halauthorid">196715-0</idno>
              <affiliation ref="#struct-696"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">L.</forename>
                <surname>Militaru</surname>
              </persName>
              <idno type="halauthorid">196716-0</idno>
              <affiliation ref="#struct-696"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">C.</forename>
                <surname>Lamard</surname>
              </persName>
              <idno type="halauthorid">196717-0</idno>
              <affiliation ref="#struct-696"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">A.</forename>
                <surname>Sibai</surname>
              </persName>
              <idno type="halauthorid">128667-0</idno>
              <affiliation ref="#struct-696"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">L.</forename>
                <surname>Auvray</surname>
              </persName>
              <email type="md5">3431d9c18f6648af0b60d89b6929c11b</email>
              <email type="domain">univ-lyon1.fr</email>
              <idno type="idhal" notation="string">laurent-auvray</idno>
              <idno type="idhal" notation="numeric">177291</idno>
              <idno type="halauthorid" notation="string">115571-177291</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-6895-0913</idno>
              <idno type="IDREF">https://www.idref.fr/070378479</idno>
              <affiliation ref="#struct-761"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">M.</forename>
                <surname>Audier</surname>
              </persName>
              <idno type="halauthorid">115568-0</idno>
              <affiliation ref="#struct-761"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">J.-P.</forename>
                <surname>Sénateur</surname>
              </persName>
              <idno type="halauthorid">196718-0</idno>
              <affiliation ref="#struct-761"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">C.</forename>
                <surname>Dubourdieu</surname>
              </persName>
              <idno type="halauthorid">115567-0</idno>
              <affiliation ref="#struct-761"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">F.</forename>
                <surname>Ducroquet</surname>
              </persName>
              <email type="md5">de61d4b3fe59ef2c58557b0899f53fe5</email>
              <email type="domain">cnrs.fr</email>
              <idno type="idhal" notation="string">frederique-ducroquet</idno>
              <idno type="idhal" notation="numeric">171005</idno>
              <idno type="halauthorid" notation="string">115572-171005</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-8770-9650</idno>
              <idno type="IDREF">https://www.idref.fr/081930062</idno>
              <affiliation ref="#struct-696"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Catherine</forename>
                <surname>Dubourdieu</surname>
              </persName>
              <email type="md5">5c891f4ba1ff2b22f3fdd3fefe523ac7</email>
              <email type="domain">inpg.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2007-03-07 16:09:10</date>
              <date type="whenModified">2025-09-27 19:02:46</date>
              <date type="whenReleased">2007-03-07 16:09:10</date>
              <date type="whenProduced">2004</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="116961">
                <persName>
                  <forename>Catherine</forename>
                  <surname>Dubourdieu</surname>
                </persName>
                <email type="md5">5c891f4ba1ff2b22f3fdd3fefe523ac7</email>
                <email type="domain">inpg.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-00135402</idno>
            <idno type="halUri">https://hal.science/hal-00135402</idno>
            <idno type="halBibtex">legrand:hal-00135402</idno>
            <idno type="halRefHtml">&lt;i&gt;Microelectronic Engineering&lt;/i&gt;, 2004, 72, pp.310</idno>
            <idno type="halRef">Microelectronic Engineering, 2004, 72, pp.310</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UGA">HAL Grenoble Alpes</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INSA-LYON">Institut National des Sciences Appliquées de Lyon</idno>
            <idno type="stamp" n="INPG">Institut polytechnique de Grenoble</idno>
            <idno type="stamp" n="LMGP" corresp="FMNT">LMGP - Laboratoire des matériaux et du génie physique</idno>
            <idno type="stamp" n="INSA-GROUPE">Groupe INSA</idno>
            <idno type="stamp" n="UDL">UDL</idno>
            <idno type="stamp" n="TEST2-HALCNRS">TEST2-HALCNRS</idno>
            <idno type="stamp" n="TEST-UGA">TEST-UGA</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Electrical characterisation of SrTiO3 thin films deposited on Si(100) substrate by liquid injection MOCVD</title>
                <author role="aut">
                  <persName>
                    <forename type="first">J.</forename>
                    <surname>Legrand</surname>
                  </persName>
                  <email type="md5">c32333e8efd16ed4ea4b70f697ee40d3</email>
                  <email type="domain">univ-nantes.fr</email>
                  <idno type="idhal" notation="string">jack-legrand</idno>
                  <idno type="idhal" notation="numeric">735589</idno>
                  <idno type="halauthorid" notation="string">128671-735589</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-9028-7575</idno>
                  <idno type="IDREF">https://www.idref.fr/060386576</idno>
                  <affiliation ref="#struct-696"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">S.</forename>
                    <surname>Lhostis</surname>
                  </persName>
                  <idno type="halauthorid">115570-0</idno>
                  <affiliation ref="#struct-761"/>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Y.</forename>
                    <surname>Chang</surname>
                  </persName>
                  <idno type="halauthorid">196715-0</idno>
                  <affiliation ref="#struct-696"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">L.</forename>
                    <surname>Militaru</surname>
                  </persName>
                  <idno type="halauthorid">196716-0</idno>
                  <affiliation ref="#struct-696"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">C.</forename>
                    <surname>Lamard</surname>
                  </persName>
                  <idno type="halauthorid">196717-0</idno>
                  <affiliation ref="#struct-696"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">A.</forename>
                    <surname>Sibai</surname>
                  </persName>
                  <idno type="halauthorid">128667-0</idno>
                  <affiliation ref="#struct-696"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">L.</forename>
                    <surname>Auvray</surname>
                  </persName>
                  <email type="md5">3431d9c18f6648af0b60d89b6929c11b</email>
                  <email type="domain">univ-lyon1.fr</email>
                  <idno type="idhal" notation="string">laurent-auvray</idno>
                  <idno type="idhal" notation="numeric">177291</idno>
                  <idno type="halauthorid" notation="string">115571-177291</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-6895-0913</idno>
                  <idno type="IDREF">https://www.idref.fr/070378479</idno>
                  <affiliation ref="#struct-761"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">M.</forename>
                    <surname>Audier</surname>
                  </persName>
                  <idno type="halauthorid">115568-0</idno>
                  <affiliation ref="#struct-761"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">J.-P.</forename>
                    <surname>Sénateur</surname>
                  </persName>
                  <idno type="halauthorid">196718-0</idno>
                  <affiliation ref="#struct-761"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">C.</forename>
                    <surname>Dubourdieu</surname>
                  </persName>
                  <idno type="halauthorid">115567-0</idno>
                  <affiliation ref="#struct-761"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">F.</forename>
                    <surname>Ducroquet</surname>
                  </persName>
                  <email type="md5">de61d4b3fe59ef2c58557b0899f53fe5</email>
                  <email type="domain">cnrs.fr</email>
                  <idno type="idhal" notation="string">frederique-ducroquet</idno>
                  <idno type="idhal" notation="numeric">171005</idno>
                  <idno type="halauthorid" notation="string">115572-171005</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-8770-9650</idno>
                  <idno type="IDREF">https://www.idref.fr/081930062</idno>
                  <affiliation ref="#struct-696"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">17081</idno>
                <idno type="issn">0167-9317</idno>
                <idno type="eissn">1873-5568</idno>
                <title level="j">Microelectronic Engineering</title>
                <imprint>
                  <publisher>Elsevier</publisher>
                  <biblScope unit="volume">72</biblScope>
                  <biblScope unit="pp">310</biblScope>
                  <date type="datePub">2004</date>
                </imprint>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">SrTiO3</term>
                <term xml:lang="en">high k</term>
                <term xml:lang="en">MOCVD</term>
                <term xml:lang="en">permittivity</term>
                <term xml:lang="en">leakage current</term>
              </keywords>
              <classCode scheme="halDomain" n="phys.cond.cm-ms">Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-696" status="OLD">
          <idno type="IdRef">14971727X</idno>
          <idno type="RNSR">199511955W</idno>
          <orgName>Laboratoire de physique de la matière</orgName>
          <orgName type="acronym">LPM</orgName>
          <date type="start">1995</date>
          <date type="end">2007</date>
          <desc>
            <address>
              <addrLine>Bâtiment Blaise Pascal 7 avenue Jean Capelle 69621 VILLEURBANNE CEDEX</addrLine>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-219748" type="direct"/>
            <relation active="#struct-301088" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation name="UMR5511" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-761" status="OLD">
          <idno type="IdRef">184736579</idno>
          <idno type="ISNI">0000 0004 0386 4138</idno>
          <idno type="RNSR">199512057G</idno>
          <idno type="ROR">https://ror.org/014n97s28</idno>
          <orgName>Laboratoire des matériaux et du génie physique</orgName>
          <orgName type="acronym">LMGP</orgName>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>Grenoble INP Minatec - 3 parvis Louis Néel - CS 50257- 38016 Grenoble Cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.lmgp.grenoble-inp.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-89889" type="direct"/>
            <relation active="#struct-300275" type="direct"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR5628" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-23639" status="VALID">
          <orgName>STMicroelectronics [Crolles]</orgName>
          <orgName type="acronym">ST-CROLLES</orgName>
          <desc>
            <address>
              <addrLine>850 rue Jean Monnet BP 16 38926 Crolles</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.st.com</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-219748" status="VALID">
          <idno type="IdRef">052444724</idno>
          <idno type="ISNI">0000 0001 2292 0228</idno>
          <orgName>Institut National des Sciences Appliquées de Lyon</orgName>
          <orgName type="acronym">INSA Lyon</orgName>
          <date type="start">1957-03-18</date>
          <desc>
            <address>
              <addrLine>20 Avenue Albert Einstein, 69621 Villeurbanne cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.insa-lyon.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-301088" type="direct"/>
            <relation active="#struct-301232" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-301088" status="VALID">
          <idno type="ROR">https://ror.org/01rk35k63</idno>
          <orgName>Université de Lyon</orgName>
          <desc>
            <address>
              <addrLine>92 rue Pasteur - CS 30122, 69361 Lyon Cedex 07</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.universite-lyon.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-301232" status="VALID">
          <idno type="IdRef">162105150</idno>
          <orgName>Institut National des Sciences Appliquées</orgName>
          <orgName type="acronym">INSA</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-89889" status="OLD">
          <idno type="IdRef">026388804</idno>
          <idno type="ROR">https://ror.org/05sbt2524</idno>
          <orgName>Institut polytechnique de Grenoble - Grenoble Institute of Technology</orgName>
          <orgName type="acronym">Grenoble INP</orgName>
          <date type="start">2007-01-01</date>
          <date type="end">2019-12-31</date>
          <desc>
            <address>
              <addrLine>46 avenue Félix Viallet 38031 Grenoble Cedex 1</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.grenoble-inp.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300275" status="OLD">
          <idno type="IdRef">026388804</idno>
          <orgName>Institut National Polytechnique de Grenoble</orgName>
          <orgName type="acronym">INPG</orgName>
          <date type="end">2006-12-31</date>
          <desc>
            <address>
              <addrLine>46 avenue Félix Viallet 38031 Grenoble Cedex 1</addrLine>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-341038" status="VALID">
          <idno type="IdRef">232435103</idno>
          <idno type="ISNI">000000010626358X</idno>
          <idno type="ROR">https://ror.org/02cte4b68</idno>
          <orgName>Institut de Chimie - CNRS Chimie</orgName>
          <orgName type="acronym">INC-CNRS</orgName>
          <date type="start">2009-10-01</date>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs.fr/inc</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>