Conference Papers Year : 1997
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hal-00132713 , version 1 (22-02-2007)

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  • HAL Id : hal-00132713 , version 1

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F. Flory, Stephane Tisserand, H. Rigneault, L. Roux, P. Moretti. Ion implantation in dielectric thin films for passive and active components. Thin Film Physics and Applications, Apr 1997, Shangaï, China. ⟨hal-00132713⟩
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