Conference Papers
Year : 1997
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https://hal.science/hal-00132713
Submitted on : Thursday, February 22, 2007-1:59:09 PM
Last modification on : Tuesday, June 4, 2024-11:06:03 AM
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- HAL Id : hal-00132713 , version 1
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F. Flory, Stephane Tisserand, H. Rigneault, L. Roux, P. Moretti. Ion implantation in dielectric thin films for passive and active components. Thin Film Physics and Applications, Apr 1997, Shangaï, China. ⟨hal-00132713⟩
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