RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers
Résumé
In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while achieving high eigenfrequencies in the GHz range for lateral flexural solicitation. Using an electromechanical amplitude modulation setup, a fundamental resonance frequency at 1.12 GHz has been extracted with a quality factor of 180, and its first harmonic has been measured at 2.5 GHz associated with a quality factor of 62