Packaging methodology for RF devices using a BCB membrane transfert technique

S. Seok; N. Rolland; P.A. Rolland

Journal Articles Journal of Micromechanics and Microengineering Year : 2006

Packaging methodology for RF devices using a BCB membrane transfert technique

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1

S. Seok

Function : Author

N. Rolland

Function : Author
PersonId : 749625
IdHAL : nathalie-rolland

Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520

P.A. Rolland

Function : Author

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https://hal.science/hal-00126798

Submitted on : Friday, January 26, 2007-11:04:36 AM

Last modification on : Wednesday, January 24, 2024-9:54:18 AM

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hal-00126798 , version 1 (26-01-2007)

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HAL Id : hal-00126798 , version 1

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S. Seok, N. Rolland, P.A. Rolland. Packaging methodology for RF devices using a BCB membrane transfert technique. Journal of Micromechanics and Microengineering, 2006, 16, pp.2384-2388. ⟨hal-00126798⟩

Packaging methodology for RF devices using a BCB membrane transfert technique

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