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Journal Articles Electronics Letters Year : 1996

Coplanar waveguides on dielectric membranes micromachined on GaAs substrate

Abstract

GaAs micromachining technology was used for fabricating coplanar transmission lines on Si3N4 and polyimide membranes deposited on GaAs substrates. On-wafer measurements of scattering parameters up to 75 GHz for several line configurations show a constant phase velocity of 2.9E8 m/s and a predominance of metallic losses with a square root frequency dependence.

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hal-00076886 , version 1 (31-05-2006)

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  • HAL Id : hal-00076886 , version 1

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Patrice Salzenstein, Olivier Dupuis, Mohamed Helal, Eric Lheurette, Olivier Vanbésien, et al.. Coplanar waveguides on dielectric membranes micromachined on GaAs substrate. Electronics Letters, 1996, 32, pp.821-822. ⟨hal-00076886⟩
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