Coplanar waveguides on dielectric membranes micromachined on GaAs substrate
Abstract
GaAs micromachining technology was used for fabricating coplanar transmission lines on Si3N4 and polyimide membranes deposited on GaAs substrates. On-wafer measurements of scattering parameters up to 75 GHz for several line configurations show a constant phase velocity of 2.9E8 m/s and a predominance of metallic losses with a square root frequency dependence.