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Communication Dans Un Congrès Année : 2005

A Bi-stable Micro-machined Piezoelectric Transducer for Mechanical to Electrical Energy Transformation

Résumé

This paper presents a scavenging energy application of piezoelectric micro-machined ultrasonic transducers (pMUT). The micro power generator is composed by a silicon membrane (600µm diameter and 1µm thickness) with a 2µm thick PZT layer. The mechanical energy is converted to electrical energy through the piezoelectric effect as the bi-stable device switches between two stable states. We have experimentally tested the result of such a state change due to a simple rotation of the device in the gravity field by connecting the device to a high sampling-rate oscilloscope. The effect of the state change is a very sharp signal (larger than IV during 100 µs) corresponding to the stress inversion (compression).

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Dates et versions

hal-00009224 , version 1 (29-09-2005)

Identifiants

  • HAL Id : hal-00009224 , version 1

Citer

Karim Dogheche, B. Cavallier, P. Delobelle, L. Hirsinger, Eric Cattan, et al.. A Bi-stable Micro-machined Piezoelectric Transducer for Mechanical to Electrical Energy Transformation. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP'05), June 1-3, 2005, Montreux, Switzerland. pp.303-304. ⟨hal-00009224⟩
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