Communication Dans Un Congrès Année : 2004

Fabrication and characterization of high-Q microresonators using thin plate mechanical modes

Résumé

The growing place of electronics devices in our society increases the demand of small devices such as RF filters, time references and oscillators. The aim of this work concerns the design and characterization of a new kind of crystalline silicon microresonator fabricated using a DRIE (Deep Reactive Ion Etching) technique. This device can be fabricated by IC compatible techniques. This kind of microresonators is electrostatically actuated and uses a contour or Lamý mode as fundamental mode of vibration. Its size gives the resonant frequency and behavior. The mechanical characterization of one microresonator is carried out using an optical bench set-up. The first results obtained on a device show a high Q factor in air close to 1000 at the resonant frequency of 10.3 MHz.

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Dates et versions

hal-00009088 , version 1 (26-09-2005)

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Citer

Skandar Basrour, J.R. Coudevylle, M. de Labachelerie. Fabrication and characterization of high-Q microresonators using thin plate mechanical modes. Proceedings of SPIE -- Volume 5343 Reliability, Testing, and Characterization of MEMS/MOEMS III, 2004, San Jose, CA, United States. pp.273-283, ⟨10.1117/12.524751⟩. ⟨hal-00009088⟩
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