Communication Dans Un Congrès Année : 2001

Design and test of new high Q microresonators fabricated by UV-LIGA

Résumé

We report in this paper the study of a new metallic microresonator realized by UV-LIGA technique. This kind of device is excited electrostatically and takes advantage of the contour modes or Lame-modes of the structure. Design methods of such device are presented and simulated with a Finite Element Program. Details on the microfabrication process are also presented. The vibration modes are detected with an optical bench set-up and preliminary electrical results are presented. A comparison between experiments and numerical predictions are finally discussed.

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Dates et versions

hal-00008618 , version 1 (12-09-2005)

Identifiants

  • HAL Id : hal-00008618 , version 1

Citer

Skandar Basrour, H. Majjad, J.-R. Coudevylle, M. de Labacherie. Design and test of new high Q microresonators fabricated by UV-LIGA. Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP'01), Apr 2001, Cannes, France. pp.310-316. ⟨hal-00008618⟩
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