Communication Dans Un Congrès Année : 2001

Modeling and characterization of Lame-mode microresonators realized by UV-LIGA

Résumé

We report in this paper the study of a new metallic microresonator realized by UV-LIGA technique. This kind of device is excited electrostatically and takes advantage of the contour modes or Lame-modes of the structure. Design methods of such device are presented and simulated with a Finite Element Program. Details on the microfabrication process are also presented. The vibration modes are detected with an optical bench setup and preliminary electrical results are presented. A comparison between experiments and numerical predictions are finally discussed.

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Dates et versions

hal-00007770 , version 1 (03-08-2005)

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  • HAL Id : hal-00007770 , version 1

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H. Majjad, J.-R. Coudevylle, Skandar Basrour, M. de Labachelerie. Modeling and characterization of Lame-mode microresonators realized by UV-LIGA. 2001, pp.300-3 vol. 1. ⟨hal-00007770⟩
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