Reduced-order modeling of electrostatic MEMS resonators - Archive ouverte HAL Accéder directement au contenu
Cours Année : 2015

Reduced-order modeling of electrostatic MEMS resonators

Résumé

This is a handout for my course on MEMS physics and modeling at Université Paris-Saclay. It contains useful formulas for modeling the behavior of electrostatically-actuated 2- and 3-port cantilever / CC-beam resonators oscillating close to their first resonance frequency, in their nonlinear regime. Nonlinear damping is neglected but may be included using the procedure given in the handout. Feel free to contact me if you have any questions / comments regarding this material.
Fichier principal
Vignette du fichier
Note on MEMS modeling.pdf (305.31 Ko) Télécharger le fichier
Loading...

Dates et versions

cel-01535669 , version 1 (09-06-2017)

Licence

Paternité - Pas d'utilisation commerciale

Identifiants

  • HAL Id : cel-01535669 , version 1

Citer

Jérôme Juillard. Reduced-order modeling of electrostatic MEMS resonators. Master. France. 2015. ⟨cel-01535669⟩
402 Consultations
103 Téléchargements

Partager

Gmail Facebook X LinkedIn More