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Article Dans Une Revue Microelectronic Engineering Année : 2007

Impact of the Cu-based substrates and catalyst deposition techniques on carbon nanotube growth at low temperature by PECVD

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hal-00392080 , version 1 (05-06-2009)

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M. Dubosc, S. Casimirius, Marie-Paule Besland, Christophe Cardinaud, Agnès A. Granier, et al.. Impact of the Cu-based substrates and catalyst deposition techniques on carbon nanotube growth at low temperature by PECVD. Microelectronic Engineering, 2007, 84 (11), pp.2501. ⟨10.1016/j.mee.2007.05.024⟩. ⟨hal-00392080⟩
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