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Article Dans Une Revue Microsystem Technologies Année : 2022

Self-identification algorithm for zeolite-based thermal capacity gas sensor

Résumé

We demonstrate a new operation mode of thermal gas sensor based on thermal capacity extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating. The identification algorithm is a continuous-time closed-loop identification algorithm based on the instrumental variable principle.
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Dates et versions

hal-01810620 , version 1 (24-10-2018)

Identifiants

Citer

M. Pouliquen, M. Denoual, C. Jorel, C. Radu, D. Robbes, et al.. Self-identification algorithm for zeolite-based thermal capacity gas sensor. Microsystem Technologies, 2022, 28 (6), pp.1313-1319. ⟨10.1007/s00542-018-3883-5⟩. ⟨hal-01810620⟩
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