4H-SIC p-type doping determination from secondary electrons imaging - Archive ouverte HAL Access content directly
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hal-02066375 , version 1 (13-03-2019)

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  • HAL Id : hal-02066375 , version 1

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M Kayambaki, N. Makris, K. Tsagarakis, Hervé Peyre, A Stavrinidis, et al.. 4H-SIC p-type doping determination from secondary electrons imaging. 12th European Conference on Silicon Carbide and Related Materials (ECSCRM), Sep 2018, Birmingham, United Kingdom. ⟨hal-02066375⟩
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