Fabrication of Tungsten high aspect ratio micro-tools by electrochemical etching, by controlling the immersed length and the etching charge
Résumé
This paper aims to present the fabrication of high aspect ratio cylindrical Tungsten micro-tools using electrochemical etching. The etching protocol has been optimized by controlling the immersed length and the etching charge which made it possible the automated fabrication of micro-tools with 88µm ± 1µm average diameter over 3,5mm length starting from 250µm diameter Tungsten wires.
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