Fabrication of Tungsten high aspect ratio micro-tools by electrochemical etching, by controlling the immersed length and the etching charge - Institut des nanotechnologies de Lyon
Communication Dans Un Congrès Année : 2021

Fabrication of Tungsten high aspect ratio micro-tools by electrochemical etching, by controlling the immersed length and the etching charge

Asmae Tafraouti
  • Fonction : Auteur
  • PersonId : 1449930
Pascal Kleimann
Yasmina Layouni
  • Fonction : co premier-auteur
  • PersonId : 1449931

Résumé

This paper aims to present the fabrication of high aspect ratio cylindrical Tungsten micro-tools using electrochemical etching. The etching protocol has been optimized by controlling the immersed length and the etching charge which made it possible the automated fabrication of micro-tools with 88µm ± 1µm average diameter over 3,5mm length starting from 250µm diameter Tungsten wires.

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Dates et versions

hal-04804984 , version 1 (26-11-2024)

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  • HAL Id : hal-04804984 , version 1

Citer

Asmae Tafraouti, Pascal Kleimann, Yasmina Layouni. Fabrication of Tungsten high aspect ratio micro-tools by electrochemical etching, by controlling the immersed length and the etching charge. Proceedings of the PlasmaTech/SICT 2021 International Joint Conference, Feb 2021, Paris, France. ⟨hal-04804984⟩
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