A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications
Résumé
Silicon photonics is one of the most prominent technology platforms for integrated
photonics and can support a wide variety of applications. As we move towards a mature industrial
core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities
of our silicon photonics platform. Depending on the application being targeted, we have developed
several integration strategies for the incorporation of SiN. We present these processes, as well as
key components for dedicated applications. In particular, we present the use of SiN for athermal
multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency
combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology
applications and the use of SiN to realize optical phased arrays in the 800–1000 nm wavelength range
for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using
a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the
versatility and scalability of the Si-SiN platform.
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