Sr<sub>2</sub>Ta<sub>2</sub>O<sub>7</sub>-based oxide and oxynitride perovskite films: reactive magnetron deposition and dielectric characterization - Archive ouverte HAL Access content directly
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Sr2Ta2O7-based oxide and oxynitride perovskite films: reactive magnetron deposition and dielectric characterization

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hal-01148563 , version 1 (04-05-2015)

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  • HAL Id : hal-01148563 , version 1

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Simon Jacq, Claire Le Paven-Thivet, Ratiba Benzerga, Laurent Le Gendre, Vincent Laur, et al.. Sr2Ta2O7-based oxide and oxynitride perovskite films: reactive magnetron deposition and dielectric characterization. European Materials Research Society - EMRS 2015, May 2015, Lille, France. ⟨hal-01148563⟩
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