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https://hal.science/hal-01148561
Submitted on : Monday, May 4, 2015-7:00:17 PM
Last modification on : Friday, March 24, 2023-2:53:00 PM
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- HAL Id : hal-01148561 , version 1
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Simon Jacq, Laurent Le Gendre, Claire Le Paven-Thivet, Ratiba Benzerga, Franck Tessier, et al.. Deposition of strontium and tantalum-based oxide and oxynitride perovskite thin films. European Materials Research Society - EMRS 2015, May 2015, Lille, France. ⟨hal-01148561⟩
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