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Dielectric performance of innovant oxynitride thin films

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hal-00751678 , version 1 (14-11-2012)

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  • HAL Id : hal-00751678 , version 1

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Laurent Le Gendre, Claire Le Paven-Thivet, Ratiba Benzerga, Viet Hung Nguyen, Christophe Delaveaud, et al.. Dielectric performance of innovant oxynitride thin films. séminaire invité devant la Business & Technology Development Unit - MURATA Electronics - Yasu-shi, Japon, Nov 2012, Yasu, Japan. ⟨hal-00751678⟩
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