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Conference Papers Year : 2012

Lanthanum titanium oxide and oxynitride thin films grown by water vapour and nitrogen reactive RF sputtering

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hal-00710199 , version 1 (20-06-2012)

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  • HAL Id : hal-00710199 , version 1

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Yu Lu, Claire Le Paven-Thivet, Ratiba Benzerga, Laurent Le Gendre, Viet Hung Nguyen, et al.. Lanthanum titanium oxide and oxynitride thin films grown by water vapour and nitrogen reactive RF sputtering. 7th International Symposium on NiTrides - ISNT 2012, Jun 2012, St-Malo, France. pp.1. ⟨hal-00710199⟩
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