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Homogeneity of oxynitride thin films deposited by reactive RF magnetron sputtering

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hal-00606924 , version 1 (07-07-2011)

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  • HAL Id : hal-00606924 , version 1

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Yu Lu, Claire Le Paven-Thivet, Ratiba Benzerga, Laurent Le Gendre, Ala Sharaiha, et al.. Homogeneity of oxynitride thin films deposited by reactive RF magnetron sputtering. European Materials Research Society - Spring Meeting 2011, May 2011, Nice, France. ⟨hal-00606924⟩
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