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https://hal.science/hal-00606924
Submitted on : Thursday, July 7, 2011-2:18:14 PM
Last modification on : Monday, January 24, 2022-12:16:29 PM
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- HAL Id : hal-00606924 , version 1
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Yu Lu, Claire Le Paven-Thivet, Ratiba Benzerga, Laurent Le Gendre, Ala Sharaiha, et al.. Homogeneity of oxynitride thin films deposited by reactive RF magnetron sputtering. European Materials Research Society - Spring Meeting 2011, May 2011, Nice, France. ⟨hal-00606924⟩
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