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Dielectric oxynitride laTiOxNy thin films

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hal-00606922 , version 1 (07-07-2011)

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  • HAL Id : hal-00606922 , version 1

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Viet Hung Nguyen, Ahmed Ziani, Ratiba Benzerga, Claire Le Paven-Thivet, Didier Fasquelle, et al.. Dielectric oxynitride laTiOxNy thin films. European Materials Research Society - Spring Meeting 2011, May 2011, Nice, France. ⟨hal-00606922⟩
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