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https://hal.science/hal-00567554
Submitted on : Monday, February 21, 2011-2:29:15 PM
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Claire Le Paven-Thivet, Ratiba Benzerga, Yu Lu, Ahmed Ziani, Laurent Le Gendre, et al.. Reactive sputtering deposition of perovskite LaTiOxNy films using a stoichiometric oxynitride LaTiO2N target. 9th International Conference on Reactive Sputtering Deposition 2010, Dec 2010, Ghent, Belgium. ⟨hal-00567554⟩
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