Reactive sputtering deposition of perovskite LaTiO<sub>x</sub>N<sub>y</sub> films using a stoichiometric oxynitride LaTiO<sub>2</sub>N target - Archive ouverte HAL Access content directly
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Reactive sputtering deposition of perovskite LaTiOxNy films using a stoichiometric oxynitride LaTiO2N target

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hal-00567554 , version 1 (21-02-2011)

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  • HAL Id : hal-00567554 , version 1

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Claire Le Paven-Thivet, Ratiba Benzerga, Yu Lu, Ahmed Ziani, Laurent Le Gendre, et al.. Reactive sputtering deposition of perovskite LaTiOxNy films using a stoichiometric oxynitride LaTiO2N target. 9th International Conference on Reactive Sputtering Deposition 2010, Dec 2010, Ghent, Belgium. ⟨hal-00567554⟩
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