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Nanoimprint lithography: full wafer replication of nanometer features
R. Pelzer
,
C. Gourgon
,
S. Landis
,
P. Kettner
Conference papers
hal-00385937v1
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Study of 193-nm resist degradation under various etch chemistries
Arnaud Bazin
,
Michael May
,
Erwine Pargon
,
Bénédicte Mortini
,
Olivier Joubert
Advances in Resist Materials and Processing Technology XXIV, Feb 2007, San Jose, United States. ⟨10.1117/12.711415⟩
Conference papers
hal-00384232v1
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Single Nanostructure Device fabricated by alternative technologies
J. Tallal
,
T. Pinedo-Rivera
,
K. Berton
,
D. Peyrade
EIPBN - The 51st EIPBN Electron, Ion, Photon Beam Technology and Nanofabrication, May 2007, Denver, United States
Conference papers
hal-00394410v1
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ZnO nanowire-based radial structures for photovoltaic applications
Vincent Consonni
,
G. Rey
,
J. Bonaimé
,
N. Karst
,
B. Doisneau
,
et al.
NWG 2010 - 5th Nanowire Growth Workshop, Nov 2010, Rome, Italy
Conference papers
hal-00807398v1
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Chamber walls coating during patterning of dielectric damascene structures with a metal hard mask: consequence on cleaning strategies
Thierry Chevolleau
,
Maxime Darnon
,
Thibaut David
,
Nicolas Possémé
,
Olivier Joubert
Plasma Etch and Strip in Microelectronics Workshop, 2007, Detroit, United States
Conference papers
hal-00461598v1
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Emerging Nanotechnology for integration of Nanostructures in Nanoelectronic devices
Thierry Baron
,
Claire Agraffeil
,
Florian Dhalluin
,
Martin Kogelschtaz
,
Gilles Cunge
,
et al.
2009 Advanced Research Workshop (FTM-6) Future Trends in Microelectronics: Unmapped Roads, 2009, Sardinia, Italy. ⟨10.1002/9780470649343.ch14⟩
Conference papers
hal-00461115v1
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Réalisation et caractérisation de cellules photovoltaïques
Anne Kaminski-Cachopo
,
Delphine Constantin
,
Loïc Vincent
,
Quentin Rafhay
,
Ahmad Bsiesy
12es Journées Pédagogiques du CNFM, Nov 2012, Saint-Malo, France. pp.59-64
Conference papers
hal-00807271v1
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A Semi-Lumped Miniaturized Spurious Less Frequency Tunable Three-port Divider\Combiner with 20 dB Isolation Between Output Ports
A.L. Perrier
,
O. Exshaw
,
J.M. Duchamp
,
Philippe Ferrari
International Microwave Theory and Techniques Symposium, MTT-S, 2006, San Francisco, United States
Conference papers
hal-00147888v1
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Bayesian Updating of Probabilistic Time-Dependent Fatigue Model: Application to Jacket Foundations of Wind Turbines
Benjamin Rocher
,
Franck Schoefs
,
Marc François
,
Arnaud Salou
EWSHM - 7th European Workshop on Structural Health Monitoring, IFFSTTAR, Inria, Université de Nantes, Jul 2014, Nantes, France
Conference papers
hal-01021210v1
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Scaling-down lithographic dimensions with block-copolymer materials: 10nm-sized features with PS-b-PMMA
X. Chevalier
,
C. Nicolet
,
R. Tiron
,
A. Gharbi
,
M. Argoud
,
et al.
Conference papers
hal-00944986v1
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Etching Process Scalability and Challenges for ULK Materials
T. Chevolleau
,
N. Posseme
,
T. David
,
R. Bouyssou
,
J. Ducote
,
et al.
Conference papers
hal-00625314v1
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OPC model error study through mask and SEM measurement error
Mame Kouna Top
,
David Fuard
,
Vincent Farys
,
Yorick Trouiller
,
Patrick Schiavone
Metrology, Inspection, and Process Control for Microlithography XXIV, Feb 2010, San Jose (CA), United States. in press
Conference papers
hal-00462229v1
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Paving the way for multiple applications for the 3D-AFM technique in the semiconductor industry
J. Foucher
,
E. Pargon
,
M. Martin
,
S. Reyne
,
C. Dupré
Conference papers
hal-00384223v1
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Characterization of silicon etching in synchronized pulsed plasma
Maxime Darnon
,
M. Haass
,
G. Cunge
,
O. Joubert
,
S. Banna
Conference papers
hal-00860917v1
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Demolding strategy to improve the hot embossing throughput
Tanguy Lévéder
,
Stéfan Landis
,
Laurent Davoust
,
Sébastien Soulan
,
Nicolas Chaix
Conference papers
hal-00266799v1
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In-line etching process control using dynamic scatterometry
S. Soulan
,
M. Besacier
,
T. Leveder
,
P. Schiavone
Conference papers
hal-00168934v1
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Best focus shift mitigation for extending the depth of focus
Anna Szücs
,
Jonathan Planchot
,
Vincent Farys
,
Emek Yesilada
,
Clovis Alleaume
,
et al.
Conference papers
hal-00941631v1
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Study of propagation modes of bent waveguides and micro-ring resonators by means of the Aperiodic Fourier Modal Method
D. Bucci
,
B. Martin
,
A. Morand
Conference papers
hal-00603655v1
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An inverse ellipsometric problem for thin film characterization: comparison of different optimization methods
Ayse Akbalik
,
Sébastien Soulan
,
Jean-Hervé Tortai
,
David Fuard
,
Issiaka Kone
,
et al.
Metrology, Inspection, and Process Control for Microlithography XXIII, Feb 2009, San Jose (CA), United States. in press, ⟨10.1117/12.814118⟩
Conference papers
hal-00374509v1
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3D AFM Characterization of the Edge Roughness of Silicon High Q Resonators
P. Schiavone
,
M. Martin
,
P. Alipour
,
A.A Eftekhar
,
S. Yegnanarayanan
,
et al.
Conference on Lasers and Electro-Optics 2010, May 2010, San Jose (CA), United States
Conference papers
hal-00462233v1
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Industrial characterization of scatterometry for advanced APC of 65 nm CMOS logic gate patterning
Karen Dabertrand
,
Mathieu Touchet
,
Stéphanie Kremer
,
Catherine Chaton
,
Maxime Gatefait
,
et al.
Conference papers
hal-00462558v1
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LASTIC: a Light Aspiration device for in vivo Soft TIssue Characterization
Patrick Schiavone
,
Emmanuel Promayon
,
Yohan Payan
Conference papers
hal-00439902v1
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Dynamic scatterometry for profile control during resist trimming process
Mohamed El Kodadi
,
Sébastien Soulan
,
Maxime Besacier
,
Patrick Schiavone
EIPBN 2009 - The 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, May 2009, Marco Island, United States
Conference papers
hal-00461060v1
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3D nanofabrication by reverse contact UV nanoimprint lithography
N. Kehagias
,
V. Reboud
,
G. Chansin
,
M. Zelsmann
,
C. Jeppesen
,
et al.
Conference papers
hal-00394539v1
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Modelling of the Programming Window Distribution in Multi Nanocrystals Memories
Luca Perniola
,
Barbara De Salvo
,
Gérard Ghibaudo
,
Armando Foglio Para
,
Georges Pananakakis
,
et al.
Conference papers
hal-00485165v1
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