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HfO2 based ReRAM : an experimental point of view
Corentin Vallée
,
C. Mannequin
,
P. Gonon
,
L. Latu-Romain
,
A. Bsiesi
et al.
MRS, Apr 2013, San francisco, United States
Conference papers
hal-00944262v1
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Caractérisation large bande et in-situ de couches minces de ZrO2 et HfO2 intégrées dans des capacités MIM
T. Bertaud
,
C. Bermond
,
T. Lacrevaz
,
Corentin Vallée
,
Y. Morand
et al.
Caractérisation large bande et in-situ de couches minces de ZrO2 et HfO2 intégrées dans des capacités MIM, May 2009, Grenoble, France
Conference papers
hal-00603027v1
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Investigation of new chalcogenide materials to improve the PCM performance
V. Sousa
,
L. Perniola
,
G. Navarro
,
N. Pashkov
,
M. Suri
et al.
2011 SIMIT, 11th Non-volatile memory technology symposium, Nov 2011, Shangai, China
Conference papers
hal-00669545v1
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Impact of oxidation on Ge2Sb2Te5 and GeTe phase-change properties
E. Gourvest
,
B. Pelissier
,
Corentin Vallée
,
A. Roule
,
S. Lhostis
et al.
Journal of The Electrochemical Society, 2012, pp.159 (4) H373-H377
Journal articles
hal-00669401v1
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Pulsed Plasma-enhanced CVD of Y2O3 in MIM capacitors
Corentin Vallée
,
Myrtil L. Kahn
,
E. Gourvest
,
M. Bonvalot
,
O. R. Joubert
et al.
54th National Symposium AVS, 2007, SEATTLE, United States
Conference papers
hal-00396830v1
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MIM capacitors using Y2O3 dielectric grown by pulsed-injection PE-MOCVD
C. Durand
,
Corentin Vallée
,
V. Loup
,
O. Salicio
,
C. Dubourdieu
et al.
Journal of Vacuum Science and Technology, 2004, A 22 (3), pp.655-660
Journal articles
hal-00390407v1
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Impedance and electric modulus study of amorphous TiTaO thin films: highlight of the interphase effect
Ahlem Rouahi
,
Abdelkader Kahouli
,
Fatiha Challali
,
Marie-Paule Besland
,
Corentin Vallée
et al.
Journal articles
hal-00908474v1
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Electrical characterization of advanced MIM capacitors with ZrO2 Insulator for high-density packaging and RF applications
T. Bertaud
,
C. Bermond
,
S. Blonkowski
,
Corentin Vallée
,
T. Lacrevaz
et al.
IEEE Transactions on Components, Packaging and Manufacturing Technology, 2012, pp.2 (2012) 502-509
Journal articles
hal-00777838v1
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Evidence of Germanium precipitation in phase-change Ge1-xTex thin films by Raman scattering
E. Gourvest
,
S. Lhostis
,
J. Kreisel
,
M. Armand
,
S. Maitrejean
et al.
Applied Physics Letters, 2009, pp.031908
Journal articles
hal-00461093v1
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Bias voltage waveform influence on the ion energy distribution and its consequence on the properties of a-C:H films obtained from C2H2 plasma
Corentin Vallée
,
F. Thièry
,
Y. Arnal
,
Y. Pauleau
,
Jean Pelletier
et al.
CIP 2001, Jun 2001, Antibes, France
Conference papers
hal-00669574v1
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Characterization of amorphous hydrogenated carbon films deposited from CO-C2H2 mixtures in a distributed ECR plasma reactor
F. Thièry
,
Corentin Vallée
,
Y. Pauleau
,
F. Gaboriau
,
A. Lacoste
et al.
Surface and Coatings Technology, 2002, 151-152, pp.165-169
Journal articles
hal-00669442v1
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Pulsed injection PE-MOCVD of Y2O3 layers for gate dielectric applications
C. Durand
,
B. Pelissier
,
Corentin Vallée
,
M. Bonvalot
,
L. Vallier
et al.
AVS 49th International Symposium, Nov 2002, Denver, United States
Conference papers
hal-00669571v1
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Metal-Insulator-Metal capacitors using Y2O3 dielectric grown by pulsed-injection plasma enhanced metalorganic chemical vapor deposition
C. Durand
,
Corentin Vallée
,
V. Loup
,
O. Salicio
,
C. Dubourdieu
et al.
Journal articles
hal-00135475v1
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Spectroscopic ellipsometric sudy of phase-change materials for data storage applications
E. Gourvest
,
Corentin Vallée
,
S. Maitrejean
,
A. Roule
,
C. Licitra
et al.
56h National Symposium AVS (2009), 2009, San Jose, United States
Conference papers
hal-00461097v1
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PE-MOCVD of GeTe material for Phase Change Memory
E. Despiau-Pujo
,
L. Dussault
,
Corentin Vallée
,
E. Gourvest
,
D. Jourde
et al.
58th National Symposium AVS, Oct 2011, Nashville, United States
Conference papers
hal-00650192v1
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Caractérisation hyperfréquences de condensateurs MIM intégrés et incluant le diélectrique ZrO2 comme isolant
T. Bertaud
,
T.T. Vo
,
C. Bermond
,
T. Lacrevaz
,
Corentin Vallée
et al.
Caractérisation hyperfréquences de condensateurs MIM intégrés et incluant le diélectrique ZrO2 comme isolant, Mar 2009, Agadir, Maroc
Conference papers
hal-00603001v1
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PE-MOCVD of GeTe materials for Phase Change Memory Applications
E. Despiau-Pujo
,
L. Dussault
,
Corentin Vallée
,
E. Gourvest
,
D. Jourde
et al.
AVS 58th International Symposium, Nashville, USA, Oct 30-Nov 4, 2011, Oct 2011, nashville, United States
Conference papers
hal-00925816v1
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Large scale catalytic growth of grapheme on nickel for transparent conductive electrodes
A. Delamoreanu
,
C. Rabot
,
Corentin Vallée
,
A. Zenasni
2012 MRS Spring Meeting, Apr 2012, San Francisco, United States
Conference papers
hal-00669532v1
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Deposition of high k Y2O3 oxides by pulsed injection plasma enhanced MOCVD
Corentin Vallée
,
C. Durand
,
B. Pelissier
,
M. Bonvalot
,
E. Gautier
et al.
12th Workshop on Dielectrics in Microelectronics (WODIM), Nov 2002, Grenoble, France
Conference papers
hal-00669570v1
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Electrode oxygen affinity influence on high k MIM capacitors
Corentin Vallée
,
P. Gonon
,
Corentin Jorel
,
F. El Kamel
Applied Physics Letters, 2010, 96, pp.233504
Journal articles
hal-00669418v1
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Electrical property improvements of yttrium oxide-based metal-insulator-metal capacitors
C. Durand
,
Corentin Vallée
,
C. Dubourdieu
,
Myrtil L. Kahn
,
M. Derivaz
et al.
Journal of Vacuum Science & Technology A, 2006, 24(3), pp.459
Journal articles
hal-00134932v1
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Modeling of non-linearities in the capacitance-voltage characteristics of high k metal-insulator-metal capacitors
P. Gonon
,
Corentin Vallée
Applied Physics Letters, 2007, 90, pp.142906
Journal articles
hal-00669433v1
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Some high k potential for MIM or RRAM applications
Corentin Vallée
,
P. Gonon
,
E. Gourvest
,
Corentin Jorel
,
M. Mougenot
et al.
55h National Symposium AVS (2008), Oct 2008, Boston, United States
Conference papers
hal-00669558v1
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Frequency effect on voltage linearity of medium-k dielectrics based RF Metal-Insulator-Metal capacitors
T. Bertaud
,
S. Blonkowski
,
C. Bermond
,
Corentin Vallée
,
M. Gros Jean
et al.
Frequency effect on voltage linearity of medium-k dielectrics based RF Metal-Insulator-Metal capacitors, Sep 2009, Athènes, Grèce., France
Conference papers
hal-00602854v1
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Silicate interface formation during the deposition of Y2O3 on Si
C. Durand
,
Corentin Vallée
,
C. Dubourdieu
,
M. Bonvalot
,
E. Gautier
et al.
Mat. Res. Soc. Symp. Proc, 2003, United States. pp.Vol. 786, E6.15
Conference papers
hal-00484644v1
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PECVD and PIID processing of diamond-like carbon
F. Thièry
,
Corentin Vallée
,
Y. Arnal
,
Jean Pelletier
Surface and Coatings Technology, 2004, pp.186 146-152, (2004)
Journal articles
hal-00477303v1
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Structural and Electrical Characterisations of Yttrium Oxide Films after Postannealing Treatments
C. Durand
,
C. Dubourdieu
,
Corentin Vallée
,
E. Gautier
,
F. Ducroquet
et al.
Journal of The Electrochemical Society, 2005, 152, pp.F217
Journal articles
hal-00135039v1
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