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Pulsed Injection Plasma Enhanced MOCVD of high k Y2O3 layers for gate dielectric Application
C. Durand
,
B. Pelissier
,
Corentin Vallée
,
M. Bonvalot
,
L. Vallier
et al.
49th International AVS Symposium & Topical Conferences, 2002, Denver, United States
Conference papers
hal-00486337v1
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Etch mechanisms of SiOC and selectivity to SiO2 and SiC in fluoro carbon based Plasmas
B. Pelissier
,
C. Durand
,
Corentin Vallée
,
M. Bonvalot
,
L. Vallier
et al.
49th International AVS Symposium & Topical Conferences, 2002, Denver, United States
Conference papers
hal-00486345v1
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Wideband frequency and in-situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors
T. Bertaud
,
C. Bermond
,
T. Lacrevaz
,
Corentin Vallée
,
Y. Morand
et al.
Journal articles
hal-00602043v1
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Frequency effect on voltage linearity of ZrO2 based RF Metal-Insulator-Metal capacitors
T. Bertaud
,
S. Blonkowski
,
C. Bermond
,
Corentin Vallée
,
P. Gonon
et al.
IEEE Electron Device Letters, 2010, 31 (2), pp.114-116
Journal articles
hal-01073558v1
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Improved electrical properties using high work function electrode materials for MIM capacitors applications
E. Gourvest
,
Myrtil L. Kahn
,
Corentin Vallée
,
P. Gonon
,
Corentin Jorel
et al.
Workshop on Dielectrics in Microelectronics (WoDiM), Jun 2008, Berlin, Germany
Conference papers
hal-00669564v1
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Evaluation of plasma parameters on PEALD deposited TACN
F. Piallat
,
V. Beugin
,
R. Gassilloud
,
P. Michallon
,
L. Dussault
et al.
MAM 2012, Mar 2012, Grenoble, France
Conference papers
hal-00669525v1
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Influence of process parameters and thermal treatment on the properties of high k oxides grown using atomic layer deposition for resistive RAM applications
A. Salaün
,
H. Grampeix
,
V. Beugin
,
C. Mannequin
,
P. Gonon
et al.
MAM 2012, Mar 2012, Grenoble, France
Conference papers
hal-00669526v1
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HfO2 based ReRAM: an experimental point of view
C. Mannequin
,
Corentin Vallée
,
P. Gonon
,
L. Latu-Romain
,
C. Guedj
et al.
2013 MRS Spring Meeting, 2013, San Francisco, United States
Conference papers
hal-00908482v1
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Growth of high dielectric constant TiO2 films in capacitors using a low temperature ALD process
J. Pointet
,
A. Bsiesy
,
P. Gonon
,
Corentin Vallée
,
B. Fléchet
et al.
E-MRS 2013 Spring Meeting, May 2013, Strasbourg, France
Conference papers
hal-00908485v1
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Optical emission spectra of TEOS and HMDSO derived plasmas used for thin film deposition
A. Granier
,
M. Vervloet
,
K. Aumaille
,
Corentin Vallée
Journal articles
hal-00477247v1
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MIM capacitors based on Yttrium oxide – Lanthanum aluminate stacks
Myrtil L. Kahn
,
Corentin Vallée
,
C. Dubourdieu
,
C. Durand
,
S. Blonkowski
et al.
Workshop "Nouveaux oxydes à forte permittivité..", 2005, Autrans, France
Conference papers
hal-00486162v1
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Elaboration, chemical and electrical analyses of intermixal and nanolaminate HfO2-Al2O3 MIM capacitor structures
M. Bonvalot
,
Myrtil L. Kahn
,
Corentin Vallée
,
C. Dubourdieu
,
O. R. Joubert
et al.
54th National Symposium AVS, 2007, SEATTLE, United States
Conference papers
hal-00396832v1
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PECVD of GeTe material for embedded applications
Corentin Vallée
,
E. Gourvest
,
P. Michallon
,
R. Blanc
,
D. Jourde
et al.
2011 MRS Spring Meeting, Apr 2011, San Francisco, United States
Conference papers
hal-00650180v1
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Resistive switching in HfO2 metal-insulator-metal devices
M. Bonvalot
,
C. Mannequin
,
P. Gonon
,
Corentin Vallée
,
V. Jousseaume
et al.
AVS 58th International Symposium and Exhibition, Oct 2011, Nashville, United States
Conference papers
hal-00650189v1
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Impact of the metallic electrode and oxygen vacancies in HfO2 RRAM for non-volatile memory
Corentin Vallée
,
P. Gonon
,
Y. Bernard
,
Corentin Jorel
,
B. Pelissier
et al.
2009 MRS Spring Meeting, 2009, San Francisco, United States
Conference papers
hal-00461098v1
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High k for linear MIM capacitors and non volatile memories
Corentin Vallée
(RRAM) – IHP (Innovations for High Performance Microelectronics, 2009, frankfurt, Germany
Conference papers
hal-00461104v1
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Growth of Zno nanowires by metal-organic chemical vapor deposition.
H. Abed
,
M. Bonvalot
,
T. Baron
,
M. Kogelschatz
,
F. Dhalluin
et al.
Workshop " Oxydes fonctionnnels pour intégration en micro- et nano-électronique ", 2008, autrans, France
Conference papers
hal-00397029v1
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Microstructure and electrical characterizations of yttrium oxide and yttrium silicate thin films deposited by pulsed liquid-injection plasma-enhanced metal-organic chemical vapor deposition
C. Durand
,
C. Dubourdieu
,
Corentin Vallée
,
V. Loup
,
M. Bonvalot
et al.
Journal of Applied Physics, 2004, pp.96 (2004) 1719-1729
Journal articles
hal-00390405v1
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Roles of oxygen and solvent in the interface formation during the pulsed-liquid injection PE-MOCVD deposition of Y2O3 in MIM and MOS structures
C. Durand
,
Corentin Vallée
,
M. Bonvalot
51st National Symposium AVS,, 2004, Anaheim, United States
Conference papers
hal-00390506v1
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Structural properties of high k Y2O3 layers prepared by Pulsed injection Plasma
Corentin Vallée
,
C. Durand
,
B. Pelissier
,
M. Bonvalot
,
C. Dubourdieu
et al.
Présentation MRS 2002 (fall meeting), 2002, Boston, United States
Conference papers
hal-00390546v1
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Role of H2 plasma in PE-MOCVD of GeTe materials for Phase Change Memory Applications
L. Dussault
,
Corentin Vallée
,
E. Gourvest
,
D. Jourde
,
S. Maitrejean
et al.
MAM 2012, Mar 2012, Grenoble, France
Conference papers
hal-00669530v1
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Nitrogen profiles in materials implanted via plasma-based ion implantation
A. Lacoste
,
Stéphane Béchu
,
Y. Arnal
,
Jean Pelletier
,
Corentin Vallée
et al.
Surface and Coatings Technology, 2002, 156, pp.125-130
Journal articles
hal-00669437v1
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Stress-induced leakage current and trap generation in HfO2 thin films
C. Mannequin
,
P. Gonon
,
Corentin Vallée
,
L. Latu-Romain
,
A. Bsiesy
et al.
Journal of Applied Physics, 2012, pp.112 (2012) 074103
Journal articles
hal-00777842v1
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Synthesis of Large Area Graphene by Solid Carbon Source
A. Delamoreanu
,
C. Rabot
,
Corentin Vallée
,
A. Zenasni
2013 MRS Spring Meeting, 2013, San Francisco, United States
Conference papers
hal-00908483v1
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Reduction of Oxygen Content in Thin PVD-TiN Film and Improvement of Electrical Characteristics by Covering it with PEALD-TaCN
F. Piallat
,
R. Gassilloud
,
P. Caubet
,
B. Pelissier
,
Cédric Leroux
et al.
2013 MRS Spring Meeting, 2013, San Francisco, United States
Conference papers
hal-00908484v1
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Patterning of GexSbxTey for nonvolatile phase-change memory applications
B. Salhi
,
T. Chevolleau
,
C. Vizioz
,
C. Jahan
,
S. Maitrejean
et al.
PESM 2012, Mar 2012, Grenoble, France
Conference papers
hal-00778000v1
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DC to Radio-Frequency Characterization of ZrO2 Dielectric for "Metal-Insulator-Metal" Integrated Capacitors
T. Bertaud
,
Corentin Vallée
,
C. Bermond
,
T. Lacrevaz
,
B. Fléchet
et al.
" DC to Radio-Frequency Characterization of ZrO2 Dielectric for "Metal-Insulator-Metal" Integrated Capacitors, Dec 2009, Singapore
Conference papers
hal-00602878v1
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Resistive switching in metal-oxide-metal devices: fundamental understanding in relation to material characterization
Corentin Vallée
,
C. Mannequin
,
P. Gonon
,
L. Latu-Romain
,
H. Grampeix
et al.
IEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM2013), Sep 2013, Bordeaux, France
Conference papers
hal-00908478v1
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Wideband frequency and in-situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors
T. Bertaud
,
C. Bermond
,
T. Lacrevaz
,
Corentin Vallée
,
Y. Morand
et al.
MAM2009 (Grenoble), 2009, grenoble, France
Conference papers
hal-00461102v1
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Deposition of GeTe phase change material by plasma enhanced MOCVD
M. Aoukar
,
Corentin Vallée
,
A. Pikon
,
D. Jourde
,
P. Michallon
et al.
19th International Vaccum Congress IVC-19, Sep 2013, Paris, France
Conference papers
hal-00904423v1
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