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authFullName_s : Corentin Vallée

Pulsed Injection Plasma Enhanced MOCVD of high k Y2O3 layers for gate dielectric Application

C. Durand , B. Pelissier , Corentin Vallée , M. Bonvalot , L. Vallier et al.
49th International AVS Symposium & Topical Conferences, 2002, Denver, United States
Conference papers hal-00486337v1

Etch mechanisms of SiOC and selectivity to SiO2 and SiC in fluoro carbon based Plasmas

B. Pelissier , C. Durand , Corentin Vallée , M. Bonvalot , L. Vallier et al.
49th International AVS Symposium & Topical Conferences, 2002, Denver, United States
Conference papers hal-00486345v1

Wideband frequency and in-situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors

T. Bertaud , C. Bermond , T. Lacrevaz , Corentin Vallée , Y. Morand et al.
Microelectronic Engineering, 2010, 87 (3), pp.301-305. ⟨10.1016/j.mee.2009.06.016⟩
Journal articles hal-00602043v1

Frequency effect on voltage linearity of ZrO2 based RF Metal-Insulator-Metal capacitors

T. Bertaud , S. Blonkowski , C. Bermond , Corentin Vallée , P. Gonon et al.
IEEE Electron Device Letters, 2010, 31 (2), pp.114-116
Journal articles hal-01073558v1

Improved electrical properties using high work function electrode materials for MIM capacitors applications

E. Gourvest , Myrtil L. Kahn , Corentin Vallée , P. Gonon , Corentin Jorel et al.
Workshop on Dielectrics in Microelectronics (WoDiM), Jun 2008, Berlin, Germany
Conference papers hal-00669564v1

Evaluation of plasma parameters on PEALD deposited TACN

F. Piallat , V. Beugin , R. Gassilloud , P. Michallon , L. Dussault et al.
MAM 2012, Mar 2012, Grenoble, France
Conference papers hal-00669525v1

Influence of process parameters and thermal treatment on the properties of high k oxides grown using atomic layer deposition for resistive RAM applications

A. Salaün , H. Grampeix , V. Beugin , C. Mannequin , P. Gonon et al.
MAM 2012, Mar 2012, Grenoble, France
Conference papers hal-00669526v1

HfO2 based ReRAM: an experimental point of view

C. Mannequin , Corentin Vallée , P. Gonon , L. Latu-Romain , C. Guedj et al.
2013 MRS Spring Meeting, 2013, San Francisco, United States
Conference papers hal-00908482v1

Growth of high dielectric constant TiO2 films in capacitors using a low temperature ALD process

J. Pointet , A. Bsiesy , P. Gonon , Corentin Vallée , B. Fléchet et al.
E-MRS 2013 Spring Meeting, May 2013, Strasbourg, France
Conference papers hal-00908485v1
Image document

Optical emission spectra of TEOS and HMDSO derived plasmas used for thin film deposition

A. Granier , M. Vervloet , K. Aumaille , Corentin Vallée
Plasma Sources Science and Technology, 2003, 12, pp.89-96. ⟨10.1088/0963-0252/12/1/312⟩
Journal articles hal-00477247v1

MIM capacitors based on Yttrium oxide – Lanthanum aluminate stacks

Myrtil L. Kahn , Corentin Vallée , C. Dubourdieu , C. Durand , S. Blonkowski et al.
Workshop "Nouveaux oxydes à forte permittivité..", 2005, Autrans, France
Conference papers hal-00486162v1

Elaboration, chemical and electrical analyses of intermixal and nanolaminate HfO2-Al2O3 MIM capacitor structures

M. Bonvalot , Myrtil L. Kahn , Corentin Vallée , C. Dubourdieu , O. R. Joubert et al.
54th National Symposium AVS, 2007, SEATTLE, United States
Conference papers hal-00396832v1

PECVD of GeTe material for embedded applications

Corentin Vallée , E. Gourvest , P. Michallon , R. Blanc , D. Jourde et al.
2011 MRS Spring Meeting, Apr 2011, San Francisco, United States
Conference papers hal-00650180v1

Resistive switching in HfO2 metal-insulator-metal devices

M. Bonvalot , C. Mannequin , P. Gonon , Corentin Vallée , V. Jousseaume et al.
AVS 58th International Symposium and Exhibition, Oct 2011, Nashville, United States
Conference papers hal-00650189v1

Impact of the metallic electrode and oxygen vacancies in HfO2 RRAM for non-volatile memory

Corentin Vallée , P. Gonon , Y. Bernard , Corentin Jorel , B. Pelissier et al.
2009 MRS Spring Meeting, 2009, San Francisco, United States
Conference papers hal-00461098v1

High k for linear MIM capacitors and non volatile memories

Corentin Vallée
(RRAM) – IHP (Innovations for High Performance Microelectronics, 2009, frankfurt, Germany
Conference papers hal-00461104v1

Growth of Zno nanowires by metal-organic chemical vapor deposition.

H. Abed , M. Bonvalot , T. Baron , M. Kogelschatz , F. Dhalluin et al.
Workshop " Oxydes fonctionnnels pour intégration en micro- et nano-électronique ", 2008, autrans, France
Conference papers hal-00397029v1

Microstructure and electrical characterizations of yttrium oxide and yttrium silicate thin films deposited by pulsed liquid-injection plasma-enhanced metal-organic chemical vapor deposition

C. Durand , C. Dubourdieu , Corentin Vallée , V. Loup , M. Bonvalot et al.
Journal of Applied Physics, 2004, pp.96 (2004) 1719-1729
Journal articles hal-00390405v1

Roles of oxygen and solvent in the interface formation during the pulsed-liquid injection PE-MOCVD deposition of Y2O3 in MIM and MOS structures

C. Durand , Corentin Vallée , M. Bonvalot
51st National Symposium AVS,, 2004, Anaheim, United States
Conference papers hal-00390506v1

Structural properties of high k Y2O3 layers prepared by Pulsed injection Plasma

Corentin Vallée , C. Durand , B. Pelissier , M. Bonvalot , C. Dubourdieu et al.
Présentation MRS 2002 (fall meeting), 2002, Boston, United States
Conference papers hal-00390546v1

Role of H2 plasma in PE-MOCVD of GeTe materials for Phase Change Memory Applications

L. Dussault , Corentin Vallée , E. Gourvest , D. Jourde , S. Maitrejean et al.
MAM 2012, Mar 2012, Grenoble, France
Conference papers hal-00669530v1

Nitrogen profiles in materials implanted via plasma-based ion implantation

A. Lacoste , Stéphane Béchu , Y. Arnal , Jean Pelletier , Corentin Vallée et al.
Surface and Coatings Technology, 2002, 156, pp.125-130
Journal articles hal-00669437v1

Stress-induced leakage current and trap generation in HfO2 thin films

C. Mannequin , P. Gonon , Corentin Vallée , L. Latu-Romain , A. Bsiesy et al.
Journal of Applied Physics, 2012, pp.112 (2012) 074103
Journal articles hal-00777842v1

Synthesis of Large Area Graphene by Solid Carbon Source

A. Delamoreanu , C. Rabot , Corentin Vallée , A. Zenasni
2013 MRS Spring Meeting, 2013, San Francisco, United States
Conference papers hal-00908483v1

Reduction of Oxygen Content in Thin PVD-TiN Film and Improvement of Electrical Characteristics by Covering it with PEALD-TaCN

F. Piallat , R. Gassilloud , P. Caubet , B. Pelissier , Cédric Leroux et al.
2013 MRS Spring Meeting, 2013, San Francisco, United States
Conference papers hal-00908484v1

Patterning of GexSbxTey for nonvolatile phase-change memory applications

B. Salhi , T. Chevolleau , C. Vizioz , C. Jahan , S. Maitrejean et al.
PESM 2012, Mar 2012, Grenoble, France
Conference papers hal-00778000v1

DC to Radio-Frequency Characterization of ZrO2 Dielectric for "Metal-Insulator-Metal" Integrated Capacitors

T. Bertaud , Corentin Vallée , C. Bermond , T. Lacrevaz , B. Fléchet et al.
" DC to Radio-Frequency Characterization of ZrO2 Dielectric for "Metal-Insulator-Metal" Integrated Capacitors, Dec 2009, Singapore
Conference papers hal-00602878v1

Resistive switching in metal-oxide-metal devices: fundamental understanding in relation to material characterization

Corentin Vallée , C. Mannequin , P. Gonon , L. Latu-Romain , H. Grampeix et al.
IEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM2013), Sep 2013, Bordeaux, France
Conference papers hal-00908478v1

Wideband frequency and in-situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors

T. Bertaud , C. Bermond , T. Lacrevaz , Corentin Vallée , Y. Morand et al.
MAM2009 (Grenoble), 2009, grenoble, France
Conference papers hal-00461102v1

Deposition of GeTe phase change material by plasma enhanced MOCVD

M. Aoukar , Corentin Vallée , A. Pikon , D. Jourde , P. Michallon et al.
19th International Vaccum Congress IVC-19, Sep 2013, Paris, France
Conference papers hal-00904423v1