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https://hal.science/hal-00925819
Submitted on : Wednesday, January 8, 2014-3:58:59 PM
Last modification on : Wednesday, May 25, 2022-10:16:02 AM
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- HAL Id : hal-00925819 , version 1
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Corentin Vallée, L. Dussault, E. Despiau-Pujo, E. Gourvest, D. Jourde, et al.. PECVD of GeTe for next generation of non volatile memory. 18th International Colloquium on Plasma Processes (CIP), Jul 2011, rennes, France. ⟨hal-00925819⟩
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