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Improved electrical properties using high work function electrode materials for MIM capacitors applications

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hal-00669564 , version 1 (13-02-2012)

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  • HAL Id : hal-00669564 , version 1

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E. Gourvest, Myrtil L. Kahn, Corentin Vallée, P. Gonon, Corentin Jorel, et al.. Improved electrical properties using high work function electrode materials for MIM capacitors applications. Workshop on Dielectrics in Microelectronics (WoDiM), Jun 2008, Berlin, Germany. ⟨hal-00669564⟩
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