Influence of oxygen vacancies on the nonlinear behaviour of high k MIM capacitors - Archive ouverte HAL Access content directly
Conference Papers Year :

Influence of oxygen vacancies on the nonlinear behaviour of high k MIM capacitors

(1) , (1) , , (1) , (1) , , (1)
1
Not file

Dates and versions

hal-00669561 , version 1 (13-02-2012)

Identifiers

  • HAL Id : hal-00669561 , version 1

Cite

Corentin Vallée, P. Gonon, F. El Kamel, E. Gourvest, Myrtil L. Kahn, et al.. Influence of oxygen vacancies on the nonlinear behaviour of high k MIM capacitors. Workshop on Dielectrics in Microelectronics (WoDiM), Jun 2008, Berlin, Germany. ⟨hal-00669561⟩
48 View
0 Download

Share

Gmail Facebook Twitter LinkedIn More