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Evaluation of plasma parameters on PEALD deposited TACN

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hal-00669525 , version 1 (13-02-2012)

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  • HAL Id : hal-00669525 , version 1

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F. Piallat, V. Beugin, R. Gassilloud, P. Michallon, L. Dussault, et al.. Evaluation of plasma parameters on PEALD deposited TACN. MAM 2012, Mar 2012, Grenoble, France. ⟨hal-00669525⟩
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