Conference Papers
Year : 2009
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https://hal.science/hal-00602814
Submitted on : Thursday, June 23, 2011-2:30:43 PM
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- HAL Id : hal-00602814 , version 1
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T. Bertaud, C. Bermond, T. Lacrevaz, Corentin Vallée, Y. Morand, et al.. Wideband frequency and in-situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors. 18th Materials for Advanced Metallization Conference, Mar 2009, Grenoble, France. ⟨hal-00602814⟩
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