Roles of oxygen plasma and solvent in the interface formation during the pulsed-liquid injection PE-MOCVD deposition of Y2O3 in MIM and MOS structures - Archive ouverte HAL Access content directly
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Roles of oxygen plasma and solvent in the interface formation during the pulsed-liquid injection PE-MOCVD deposition of Y2O3 in MIM and MOS structures

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hal-00488319 , version 1 (01-06-2010)

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  • HAL Id : hal-00488319 , version 1

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Corentin Vallée, C. Durand, M. Derivaz, Myrtil L. Kahn, M. Bonvalot. Roles of oxygen plasma and solvent in the interface formation during the pulsed-liquid injection PE-MOCVD deposition of Y2O3 in MIM and MOS structures. AVS, 51h National Symposium AVS, 2004, Anaheim, United States. ⟨hal-00488319⟩
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