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Y2O3 MIM capacitors

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Dates and versions

hal-00486158 , version 1 (25-05-2010)

Identifiers

  • HAL Id : hal-00486158 , version 1

Cite

Corentin Vallée, C. Durand, C. Dubourdieu, S. Blonkowski, Myrtil L. Kahn, et al.. Y2O3 MIM capacitors. Workshop "Nouveaux oxydes à forte permittivité..", 2005, autrans, France. ⟨hal-00486158⟩
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